Diamond and Diamond-like Films and Coatings

Front Matter....Pages i-xvi
Diamond: Potential and Status....Pages 1-16
Natural Diamond: The Standard....Pages 17-35
Electronic Structure of Diamond, Its Defects and Surfaces....Pages 37-46
Physics of Glow Discharge Plasmas and Plasma/Surface Interactions During Thin Film Growth....Pages 47-71
Reactive Gas Glow Discharges....Pages 73-95
Modelling and Simulation of Particle-Surface Interactions....Pages 97-125
Characterisation of Diamond and Diamond-Like Films....Pages 127-150
A Review of Cubic BN and Related Materials....Pages 151-172
Diamond-Like Hydrocarbon and Carbon Films....Pages 173-192
Preparation Techniques for Diamond-Like Carbon....Pages 193-227
Computer Modeling of C:H Film Growth....Pages 229-241
Amorphous, Hydrogenated Carbon Films and Related Materials: Plasma Deposition and Film Properties....Pages 243-265
Mass-Spectroscopy of Sputtered Neutral Particles During the Growth of a-C:H Films....Pages 267-274
Preparation and Characterization of Doped a -C:H Films....Pages 275-280
In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas....Pages 281-288
Production of Carbon Cluster Beams and Their Characterisation by Time-of-Flight Mass Spectroscopy....Pages 289-296
Characterization of Diamond-Like Films Prepared by Laser Ablation of Graphite....Pages 297-305
RF Plasma Deposition of a-C:H Films: Diagnostics and Modeling....Pages 307-312
From Amorphous Carbon to Amphorous Diamond-Like Carbon....Pages 313-320
The Structure of a-C:H Thin Films....Pages 321-329
Structure and Electronic Properties of Diamond-Like Carbon....Pages 331-356
Conductivity in Amorphous Carbon and Amorphous Hydrogenated Carbon Films....Pages 357-362
Indentation Testing of Thin Films and Hard Materials....Pages 363-375
Electron Spectroscopy on Carbon Based Films: Bulk and Interface Properties....Pages 377-415
The Effect of Deposition Conditions on the Optical and Tribological Properties of Annealed Diamond-Like Carbon Films....Pages 417-426
Band Edges and Gap States by Optical Absorption and Electron Spin Resonance in Amorphous Carbon (a-C) and Hydrogenated Amorphous Carbon (a-C:H)....Pages 427-437
Characterization of the Composition, Electronic Structure and Hardness of Carbon Films Obtained by Ion Implantation, Laser Ablation, and Dual Ion Beam Sputtering....Pages 439-445
Post Deposition Treatments and Stability of Diamond-Like Films....Pages 447-466
Aging Processes in Diamond-Like Carbon and Carbon/Metal Films....Pages 467-480
Applications of Diamond-Like (Hard Carbon) Films....Pages 481-498
Theory and Models for Nucleation and Growth of Diamond Films....Pages 499-523
A Step Back: Hydrogen Abstraction from Methane Using a Semiempiracal Molecular Orbital Method....Pages 525-531
Investigations on Growth Mechanisms of Diamond Thin Films by Hot Filament Assisted CVD....Pages 533-539
Carbon Bonding Environments in CVD Diamond Films Investigated via Solid-State NMR....Pages 541-547
Deposition Experiments with Separated Atomic Hydrogen and CH 4 Sources....Pages 549-554
Methods of Diamond Making....Pages 555-577
Nucleation and Growth of Low-Pressure Diamond....Pages 579-609
Control of Texture and Defect Structure for Hot-Filament-Assisted CVD Diamond Films....Pages 611-618
Physico-Chemical Aspects of Surface Treatments for Diamond Nucleation....Pages 619-625
Local Heteroepitaxial Diamond Growth on (100) Silicon....Pages 627-634
Characterization and Properties of Artificially Grown Diamond....Pages 677-713
Mechanical Properties Testing of Diamond and Diamond-Like Films by Ultra-Low Load Indentation....Pages 715-721
Thermal Wave and Raman Measurement of Polycrystalline Diamond Film Quality....Pages 723-728
Diamond Crystal Growth by Hot Filament CVD and Its Characterization....Pages 729-736
In-Vacuo Surface Analysis of Diamond Nucleation and Growth on SI (111) and Polycrystalline Tantalum....Pages 737-744
TEM And SEM Investigation of the Growth and Texture of Diamond Particles/Films Synthesized by a Flame CVD Process....Pages 745-753
Applications of Diamond Films....Pages 755-756
Turning of Aluminum Alloy Using an Insert with a Brazed Diamond Film....Pages 757-764
Device Application for Diamonds....Pages 765-765
Semiconductor Device Development with Homoepitaxial Diamond Films....Pages 767-772
Al Metal Point Contact to B-Doped Diamond Films....Pages 773-780
Tantalum Ohmic Contacts to Diamond by a Solid State Reaction Process....Pages 781-787
Some Properties of CVD-Diamond Semiconducting Structures....Pages 789-795
Static and Dynamic Electrical Conductivity of Polycrystalline Diamond Films....Pages 797-803
Electrical and Optical Properties of Diamond Films Deposited from an Oxy-Acetylene Flame....Pages 805-812
Studies on the Formation of Diamond Nucleation Sites on <100> Silicon Substrates....Pages 635-642
Hydrogen Dissociation at Hot Filaments: Determination of Absolute Atomic Hydrogen Concentrations....Pages 643-651
Emission Spectroscopy of the Microwave Plasma Used for Diamond Depostion: Importance of the C 3 Radical....Pages 653-660
Ion Energy Distribution at the Substrate in an ECR-Reactor....Pages 661-667
A New Probe for In-Situ Characterization of Diamond Surfaces During Low Pressure Chemical Vapor Deposition....Pages 669-676
Boronated Diamond Films Deposited by Radio Frequency Plasmas....Pages 813-820
Radiation Response of Diamond Films....Pages 821-828
High Rate Versus Low Rate Diamond CVD Methods....Pages 829-853
Origin and Evolution of the Science and Technology of Diamond Synthesis in the USSR....Pages 855-873
Critical Assessment of State-of-the-Art of Growing Diamond....Pages 875-888
Summary of Panel Discussions on Needs and Opportunities for Research and Development of Diamond and Diamond-Like Materials....Pages 889-891
Back Matter....Pages 893-911