Advanced Technologies Based on Wave and Beam Generated Plasmas

Front Matter....Pages i-xiii
Plasma Discharges for Materials Processing and Display Applications....Pages 1-22
The Development and Use of Surface-Wave Sustained Discharges for Applications....Pages 23-64
Electrodeless Gas Discharges for Lighting....Pages 65-96
Plasma Production above Multipolar Magnetic Field Structures: From D.C. Magnetrons to Distributed ECR....Pages 97-110
ECR Plasmas for Thin-Film Deposition....Pages 111-122
Deposition Properties and Applications of Carbon-Based Coatings....Pages 123-135
Substrate Biasing during Plasma Processing: Interest, Methods and Limitations....Pages 137-148
Ion Energy Distributions....Pages 149-173
Dusty Plasmas: Fundamental Aspects and Industrial Applications....Pages 175-190
Plasma Based Ion Implantation....Pages 191-244
Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments....Pages 245-270
Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges....Pages 271-310
Travelling Wave Discharges in Nitrogen: Modelling and Experiment....Pages 311-334
Atmospheric Pressure Discharges: Traveling Wave Plasma Sources....Pages 335-342
Modeling of Atmospheric Pressure Microwave Sustained Discharges....Pages 343-352
Long Microwave Discharges....Pages 353-365
Waves in Bounded Magnetized Plasmas....Pages 367-390
Electron Beam Generated Plasmas: Theory, Experiments, Applications....Pages 391-428
EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atoms....Pages 429-468
The Anisotropic Etching of Silicon in CF 4 , CF 4 + H 2 and CF 4-X CL X Plasma....Pages 469-470
CF 2 Production by CF 4 Electron Impact Dissociation in Gas Discharge....Pages 471-472
On Negative Ions Langmuir Probe Measurements in an Ar + 4%CF 4 Currentless Plasma....Pages 473-474
Plasma Treatment of Polymer Surfaces in Different Gases....Pages 475-476
Plasma treatment of polymer surfaces in gas mixture....Pages 477-478
Field Emission Characteristics of Thin MPCVD Diamond Films....Pages 479-480
Technological Method of Substratum Metallization by Plasma-Arc Deposition....Pages 481-482
Hydrodynamic and Electrical Characterization of a Corona Discharge Plasma Reactor....Pages 483-484
Study by Mass Spectrometry and Gas Chromatography of Fluorocarbon Waste Destruction in a Low-Pressure Plasma Reactor....Pages 485-486
Cars Applied to Plasmas for NO-Reduction....Pages 487-488
Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear Analysis....Pages 489-490
Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid Materials....Pages 491-492
Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage — High Current Pulse Generator....Pages 493-494
Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O 2 and H 2 ....Pages 495-496
Diffusion and Wall Loss of Magnesium in Decaying Plasma....Pages 497-498
Diffusion and Depopulation of the Metastable Cd 3 P 0,2 States in Collisions with Neon Atoms....Pages 499-500
Non-Local Regime of Self-Consistency in Stationary Waveguided Discharges....Pages 501-502
Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of Nonlinear Effects....Pages 503-504
Modulation Instabilities of Surface-Wave Sustained Discharges....Pages 505-506
Correlation and Spectrum Analysis of Instabilities in Waveguided Discharges....Pages 507-508
Pulsed Surface Wave Sustained Discharges: Modelling....Pages 509-510
Pulsed discharges produced by surface waves in 3-cm wavelength band in the air....Pages 511-512
Pulsed Microwave Discharge in Nitrogen: Diagnostics and Modeling....Pages 513-514
The Turning Back and the Turning Forward of the Wave Number in Surface Wave Propagation....Pages 515-516
Experimental Indications for the Existence of Plasma Resonances in Surface Wave Discharges....Pages 517-518
Test Surface Waves as a Diagnostics Tool for SWSD....Pages 519-520
Optical Spectroscopy Diagnostics of Waveguided Discharges in a Non-Stationary Regime....Pages 521-522
A New Passive Compensation Technique for Probes in Oscillating Electric Fields....Pages 523-524
Modelling of Radio Frequency Capacitively Coupled Plasma at Intermediate Pressures....Pages 525-526
Two-Dimensional Mapping of the Electron Energy Distribution Function....Pages 527-528
Modeling of the Equivalent Circuit of Inductively Coupled Plasma Sources....Pages 529-530
Optical Measurements of Gas Temperature in Microwave Discharge Plasma in Hydrogen....Pages 531-532
Gas Temperature Influence on the Particle Kinetics in a Surface-Wave-Sustained Nitrogen Discharge....Pages 533-534
Excited Atoms and Charged Particles Axial Distributions in Argon Microwave Plasmas at Various Gas Pressures....Pages 535-536
A study of excitation mechanisms in atmospheric microwave induced argon plasmas....Pages 537-538
2D Model for a Microwave Sustained Discharge in Nitrogen at Atmospheric Pressure....Pages 539-540
Influence of Ionization Effects on Drift-Dissipative Instability....Pages 541-542
Investigation of the Electron Distribution Functions in Low Pressure Electron Cyclotron Resonance Discharges....Pages 543-544
Electromagnetic Waves in a Magnetized Plasma Column....Pages 545-548
Magnetoplasmons Guided by a Cyrotropic Plasma Layer on a Metal Substrate....Pages 549-552
Wave Propagation in a Free Gyrotropic Plasma Layer....Pages 553-554
Source of an Annular Controlled Radius Plasma....Pages 555-556
Beam-Plasma Instability Effects Supporting Capacitive Low Pressure RF Discharges....Pages 557-558
Back Matter....Pages 559-569